The influence of form deviations and surface topography of micro-components on the uncertainty of their geometrical parameters

Key Engineering Materials

Volumn 381-382, Issue , 2008, Pages 649-652

  Neugebauer, Michael ^a   Krystek, Michael ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Data analysis; Form influence; Micro metrology; Uncertainty

Indexed keywords

DATA REDUCTION; GEOMETRY; MICROOPTICS; SURFACE TOPOGRAPHY; TOPOGRAPHY;

2D DATUM; DIMENSIONAL MEASUREMENTS; ENVIRONMENTAL CONDITIONS; FORM DEVIATION; MICRO-COMPONENTS; OBJECT PROPERTY; UNCERTAINTY;

UNCERTAINTY ANALYSIS;

EID: 47049115270     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.381-382.649     Document Type: Article

References (4)

1. Leach R K 2003 Proceedings of the euspen International Topical Conference on Micro Technology, Aachen, Germany, 3-10
2. th euspen International Conference, Baden bei Wien, 374-377
3. www.imm-mainz.de
4. www.alicona.com