Heterogeneous microstructure sensitive design for performance optimization of MEMS switch

JOM

Volumn 59, Issue 9, 2007, Pages 43-48

  Lemmon, T S ^a   Homer, E R ^a   Fromm, B S ^a   Fullwood, D T ^a   Jensen, B D ^a   Adams, B L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPOSITE MICROMECHANICS; CRYSTALLOGRAPHY; DIFFRACTIVE OPTICAL ELEMENTS; INDUSTRIAL ENGINEERING; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SINGLE CRYSTALS;

ACTUATION VOLTAGES; ANISOTROPIC MATERIAL PROPERTIES; BEAM WIDTHS; CASE STUDIES; CRYSTALLOGRAPHIC TEXTURING; DESIGN PROBLEMS; GEOMETRIC DESIGNS; HETEROGENEOUS MICROSTRUCTURE; MANUFACTURING PROCESSES; MATE RIAL PROPERTIES; MEMS SWITCHES; MICRO-ELECTRO- MECHANICAL SYSTEM (MEMS); MICROSTRUCTURE SENSITIVE DESIGN (MSD); NON HOMOGENEITY; PERFORMANCE OPTIMIZATIONS; PLASTIC YIELDING;

OPTIMIZATION;

EID: 47049115102     PISSN: 10474838     EISSN: 15431851     Source Type: Journal    
DOI: 10.1007/s11837-007-0115-3     Document Type: Article

References (11)

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