Light source position measurement technique applicable in SOI technology

IEEE Journal of Solid-State Circuits

Volumn 43, Issue 7, 2008, Pages 1588-1593

  Koch, Christian ^a   Oehm, Jürgen ^a   Emde, Jannik ^a,b   Budde, Wolfram ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b ELMOS Semiconductor AG   (Germany)

Author keywords

Discrete angle detection; High sensitivity sensor; Low cost optical sensor; Optical sensor; SOI technology

Indexed keywords

DETECTORS; LIGHT; LIGHT SOURCES; LIGHTING; METALS; MONOLITHIC INTEGRATED CIRCUITS; POSITION MEASUREMENT; SENSORS; SILICON COMPOUNDS; STANDARDS;

(1 1 0) SURFACE; CO-ORDINATE SYSTEMS; INTEGRATED OPTICAL SENSORS; INTEGRATED STRUCTURES; INTEGRATION PROCESSES; LIGHT INTENSITY DETECTION; MEASUREMENT TECHNIQUES; METAL LAYERS; MONOLITHIC INTEGRATIONS; OPTICAL (PET) (OPET); OPTICAL COMPONENTS; P N JUNCTIONS; SOI TECHNOLOGY; SOURCE POSITION;

OPTICAL SENSORS;

EID: 46749128526     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2008.922402     Document Type: Conference Paper

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