GaAs and GaN based SAW chemical sensors: Acoustic part design and technology

Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06

Volumn , Issue , 2006, Pages 165-168

  Rufer, L ^a   Lalinsky T ^b   Grobelny D ^a   Mir, S ^a   Vanko, G ^b   Oszi, Zs ^b   Mozolova Z ^b   Gregus J ^c  

^a TIMA LABORATORY   (France)

^b INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^c Faculty of Natural Sciences   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; CARBON DIOXIDE ARC WELDING; CHEMICAL SENSORS; CLADDING (COATING); DETECTORS; ELASTIC WAVES; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; GALLIUM ALLOYS; GALLIUM NITRIDE; GOLD; MERCURY (METAL); MICROSYSTEMS; PHOTOACOUSTIC EFFECT; PROCESS DESIGN; PROCESS ENGINEERING; SAWING; SEMICONDUCTING GALLIUM; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR MATERIALS; SEMICONDUCTOR SWITCHES; SENSORS; STABILIZERS (AGENTS); TECHNOLOGY; WAVES;

(E ,3E) PROCESS; (OTDR) TECHNOLOGY; BIOLOGICAL AGENTS; CHEMO-SELECTIVE; CONFERENCE PROCEEDINGS; DESIGN CONSIDERATIONS; ENVIRONMENTAL CONTAMINANTS; GASEOUS MERCURY; INTERNATIONAL CONFERENCES; LOW CONCENTRATIONS; PART DESIGN; SURFACE ACOUSTIC WAVE (SAW);

ACOUSTICS;

EID: 46749103399     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASDAM.2006.331180     Document Type: Conference Paper

References (4)

1. Directive 2002/95/EC of the European Parliament and of the Council of 27 January 2003 on the restriction of the use of certain hazardous substances in electrical and electronic equipment, Official Journal of the European Union L 37/19, 13.2.2003.
2. R. M. White, Surface Elastic Waves, Proc. of the IEEE, Vol. 58, No. 8, 1970, pp. 1238-76.
3. J. J. Caron, R. B. Haskell, P. Benoit, and J. F. Vetelino, A surface acoustic wave mercury vapour sensor, IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 45, No. 5, Sep. 1998, pp. 1393-1398.
4. A. V. Mamishev, K. Sundara-Rajan, F. Yang, Y. Du, M. Zahn, "Interdigital Sensors and Transducers", Proc. of the IEEE, Vol.92. No. 5, 2004, pp. 808-845.