Novel three-dimensional beam tracking system for stationary-sample type atomic force microscopy

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 3, Issue , 2004, Pages 1985-1989

  Hung, Shao Kang ^a,b   Hwang, Ing Shouh ^b   Fu, Li Chen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Atomic force microscope (AFM); Optical instrumentation

Indexed keywords

IMAGE ANALYSIS; LASER BEAMS; LENSES; MIRRORS; NANOTECHNOLOGY; OPTICAL COLLIMATORS; SILICON WAFERS; SURFACE PHENOMENA;

BEAM TRACKING; FALSE DEFLECTION; OPTICAL INSTRUMENTATION; POSITION SENSITIVE DETECTOR (PSD);

ATOMIC FORCE MICROSCOPY;

EID: 4644303986     PISSN: 10915281     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. G. Sinnig, C. F. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., Vol. 56, pp. 930-933, 1986.
2. P. S. Jung and D. R. Yaniv, "Novel Stationary-Sample Atomic Force Microscope with Beam-Tracking Lens," Electron. Lett., Vol. 29 No. 3, pp. 264-266, 1993.
3. J. Kwon et al, "Atomic force microscope with improved scan accuracy, scan speed, and optical vision," Rev. Sci. Instrum., Vol. 74 No. 10, pp. 4378-4383, 2003.
4. P. K. Hansma and B. Drake, "A New, Optical-Lever Based Atomic Force Microscope," J. Appl. Phys., Vol. 76 No. 2, pp. 796-799, 1994.
5. K. Nakano, "Three-Dimensional Beam Tracking for Optical Lever Detection in Atomic Force Microscopy" Rev. Sci. Instrum., Vol. 71 No. 1, pp. 137-141, 2000.