Influence of astigmatism on the fabrication of diffractive structures by use of focused ion-beam milling

Optics Express

Volumn 12, Issue 17, 2004, Pages 3954-3966

  Fu, Yongqi ^a   Bryan, Ngoi Kok Ann ^b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTIVE OPTICS; ERROR ANALYSIS; ION BEAMS; LENSES; OPTIMIZATION; PARAMETER ESTIMATION; SCANNING ELECTRON MICROSCOPY;

DIFFRACTIVE LENSES; FOCUSED-ION-BEAM (FIB) MILLING; IMAGE ABERRATION; OCTAPOLE DEFLECTION;

ELECTROMAGNETIC WAVE DIFFRACTION;

EID: 4644245149     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.003954     Document Type: Article

References (10)

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8. P. D. Prewett and G. L. R. Mair, eds., Focused Ion Beam from Liquid Metal Ion Sources (Research Studies Press, Baldock, Hertfordshire, UK, 1991).
9. A. A Tseng, "Recent developments in micromilling using focused ion beam technology," J. Micromech. Microeng. 14, R15-R34 (2004).
10. J. Orloff, ed., Handbook of Charged Particle Optics (CRC Press, Boca Raton, Fla., 1997), pp. 438-455.