A laser plasma X-ray source for the analysis of wafer surfaces by grazing emission X-ray fluorescence spectrometry

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 59, Issue 8, 2004, Pages 1159-1164

  Schwenke, H ^a   Knoth, J ^a   Beaven, P A ^a   Kiehn, R ^a   Buhrz, J ^a  

^a INSTITUTE OF MATERIALS RESEARCH   (Germany)

Author keywords

Grazing emission X ray fluorescence spectrometry; Laser plasma X ray source

Indexed keywords

CHARGE COUPLED DEVICES; DETECTORS; FLUORESCENCE; LASER PRODUCED PLASMAS; LASER PULSES; SILICON WAFERS; SPECTROMETERS; X RAY ANALYSIS;

GRAZING EMISSION X-RAY FLUORESCENCE SPECTROMETRY; LASER PLASMA X-RAY SOURCES;

SPECTROMETRY;

EID: 4644233754     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2003.11.011     Document Type: Conference Paper

References (9)

1. Sjögren A., Harbst M., Wahlström C.-G., Svanberg S., Olsson C. Rev. Sci. Instrum. 74:2003;2300-2311.
2. Hironaka Y., Nakamura K.G., Kondo K. Appl. Phys. Lett. 77:2000;4110-4111.
3. Urbach H.P., de Bokx P.K. Phys. Rev. B53:1996;3752-3763.
4. T. Mans, P. Russbueldt, E.W. Kreutz, D. Hoffmann, R. Poprawe, in: Commercial and Biomedical Applications of Ultrafast Lasers III, Proceedings of SPIE 4978, 2003, pp. 38-49.
5. Stoev K., Knoth J., Schwenke H. X-Ray Spectrom. 27:1998;166-172.
6. Knoth J., Beaven P.A., Michaelsen C., Schneider H., Schwenke H. X-Ray Spectrom. 28:1999;110-114.
7. Schwenke H., Beaven P.A., Knoth J. Mittal K.L. Particles on Surfaces 7: Detection, Adhesion and Removal. 2002;11-26 VPS Int. Publishers, Zeist, The Netherlands.
8. P.A. Beaven, M. Marmotti, R. Kampmann, J. Knoth, H. Schwenke, Spectrochim Acta B 58 (2003) 2049-2057.
9. Beaven P.A., Marmotti M., Kampmann R., Knoth J., Schwenke H. A novel gas-filled detector for pulsed X-ray sources. Spectrochim. Acta Part B. 59:2004;1329-1334.