Young's modulus of TiN, TiC, ZrN and HfN

Thin Solid Films

Volumn 153, Issue 1-3, 1987, Pages 37-43

  Torok E ^a   Perry, A J ^a   Chollet, L ^b   Sproul, W D ^c  

^a Institut Straumann   (Switzerland)

^b CSEM   (Switzerland)

^c Borg Warner Corporation Wolf and Algonquin Roads Des Plaines IL 60018 USA ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING; TITANIUM CARBIDE;

STOICHIOMETRIC PHASE; YOUNG'S MODULUS;

STAINLESS STEEL;

EID: 45949127998     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(87)90167-2     Document Type: Article

References (31)

1. Modulus of normal elasticity of porosity-free titanium and zirconium nitrides
2. Deformation of Poly crystalline Transition Metal Carbides
3. Elastic properties of zirconium carbide
4. Elastic properties of zirconium carbide
5. Elastic Properties of Some Polycrystalline Transition-Metal Monocarbides
6. Elastic Properties of Some Polycrystalline Transition-Metal Monocarbides
7. States of residual stress both in films and in their substrates
8. Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium
9. Proc. Int. Conf. on Metallurgical Coatings
10. Characterization of hard nitride and carbide titanium and zirconium coatings on high-speed steel cutting tool inserts