Improvement of the dynamic performance of an AC linear permanent magnet machine

IEMDC 2003 - IEEE International Electric Machines and Drives Conference

Volumn 2, Issue , 2003, Pages 785-790

  Jansen, J W ^a   Lomonova, E A ^a   Vandenput, A J A ^a   Compter, J C ^a   Verweij, A H ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

Actuators; Lithography; Manufacturing; Mechanical engineering; PD control; Permanent magnet machines; Production; Stators; Synchronous motors; Testing

Indexed keywords

ACTUATORS; CONTROLLERS; ELECTRIC DRIVES; ELECTRIC MACHINERY; LITHOGRAPHY; MAGNETIC ACTUATORS; MAGNETS; MANUFACTURE; MECHANICAL ACTUATORS; MECHANICAL ENGINEERING; PERMANENT MAGNETS; PRODUCTION; STATORS; SYNCHRONOUS MOTORS; TESTING; THREE TERM CONTROL SYSTEMS;

CONSTANT-SPEED OPERATIONS; CONTROLLER DESIGNS; DYNAMIC PERFORMANCE; LINEAR MACHINES; LINEAR PERMANENT MAGNET; PD CONTROL; PERMANENT-MAGNET MACHINE; POSITION ACCURACY;

ELECTRIC MACHINE CONTROL;

EID: 45849138132     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEMDC.2003.1210325     Document Type: Conference Paper

References (5)

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5. Sheng-Ming Yang, Shuenn-Jenn Ke, Performance evaluation of a velocity observer for accurate velocity estimation of servo motor drives, IEEE Trans. on Industry Applications, vol 36, no 1, pp. 98-104, Jan/Feb 2000.