Enhancing effects of microcavities on shear-horizontal surface acoustic wave sensors: A finite element simulation study

Applied Physics Letters

Volumn 92, Issue 24, 2008, Pages

  Cular, Stefan ^a   Sankaranarayanan, Subramanian K R S ^a,b   Bhethanabotla, Venkat R ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENHANCING EFFECTS; FINITE ELEMENT (FE) SIMULATIONS; HORIZONTAL SURFACES; SHEAR-HORIZONTAL SURFACE ACOUSTIC WAVE (SH-SAW) SENSORS;

ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; DETECTORS; ELASTIC WAVES; ELECTRIC CURRENTS; FINITE ELEMENT METHOD; MICROCAVITIES; PHOTOACOUSTIC EFFECT; SENSORS; SHEARING MACHINES; WAVES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 45849123259     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2949553     Document Type: Article

References (11)

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