Etching of chalcogenide glass for IR microoptics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6940, Issue , 2008, Pages

  Smith, John G ^a   Borek, Gregg T ^a  

^a MEMS Optical Incorporated   (United States)

Author keywords

Chalcogenide glass; Diffractive optics; Grayscale photolithography; Infrared; Plasma etching

Indexed keywords

COMPUTER NETWORKS; ETCHING; GLASS; INDUSTRIAL ENGINEERING; INFRARED RADIATION; IRIDIUM; METAL CLADDING; MICROOPTICS; NONMETALS; PIGMENTS; SELENIUM; SELENIUM COMPOUNDS; SOFTWARE TESTING; SULFUR; TECHNOLOGY;

CHALCOGENIDE GLASSES; CHALCOGENIDE MATERIALS; COVALENTLY BONDED; ETCHING PROCESSES; INFRARED TECHNOLOGIES; MANUFACTURING PROCESSES; PERIODIC TABLES; SEMI CONDUCTOR FABRICATION; WAFER-SCALE;

AMORPHOUS MATERIALS;

EID: 45749143184     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.778748     Document Type: Conference Paper

References (4)

1. Bass, Michael. Handbook of Optics Volume 2. McGraw-Hill, New York, 1995.
2. Wood, A.P. and Rogers, P.J. "Hybrid optics in dual waveband infrared systems." Proc. of SPIE Vol. 3482, 602-613, (1998).
3. de la Fuente, Marta C. "GASIR 1 : A Promising Material For Dual Waveband Systems." International Optical Design Conference, June 4-8, 2006.
4. Sun, Q. et.al. "Application of harmonic diffraction in infrared." Proc. of SPIE Vol. 4927, 125-132, (2002).