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Volumn 32, Issue , 2008, Pages 259-262
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A study on the nanoindentation behaviour of single crystal silicon using hybrid MD-FE method
a
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Author keywords
Berkovich indenter; Finite element analysis; Molecular dynamic simulation; Nano scale simulation; Tension test
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Indexed keywords
COMPUTER NETWORKS;
FINITE DIFFERENCE METHOD;
FINITE ELEMENT METHOD;
FORECASTING;
GROWTH (MATERIALS);
HYBRID MATERIALS;
INTERFACES (MATERIALS);
IRON;
MATERIALS;
MATERIALS SCIENCE;
MATHEMATICAL MODELS;
MECHANICS;
MOLECULAR DYNAMICS;
MOLECULAR MECHANICS;
MOLECULES;
NANOINDENTATION;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
NONMETALS;
PIGMENTS;
POWDERS;
QUANTUM CHEMISTRY;
SCALES (WEIGHING INSTRUMENTS);
SILICON;
SILICON WAFERS;
SINGLE CRYSTALS;
TECHNOLOGY;
TENSILE TESTING;
(100) SILICON;
ALTERNATIVE PROCEDURES;
BERKOVICH INDENTER;
COMPUTATIONAL COSTS;
EXPERIMENTAL DATA;
FEA MODELING;
FINITE ELEMENT (FE);
FINITE ELEMENT ANALYSIS (FEA);
HYBRID MOLECULAR-DYNAMICS;
INTERNATIONAL CONFERENCES;
MACRO SCALES;
MATE RIAL PROPERTIES;
MATERIALS SCIENCE AND TECHNOLOGY;
MD SIMULATIONS;
MOLECULAR DYNAMICS (MD);
MOLECULAR-DYNAMICS (MD) SIMULATIONS;
NANO SCALING;
NANO-SCALE MODELING;
NANOINDENTATION BEHAVIOR;
NEW TECHNIQUES;
SINGLE CRYSTAL SILICON (SCS);
UNIAXIAL TENSIONS;
DYNAMICS;
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EID: 45749113749
PISSN: 10226680
EISSN: None
Source Type: Book Series
DOI: 10.4028/0-87849-475-8.259 Document Type: Conference Paper |
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Times cited : (27)
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References (9)
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