Fiber-top micromachined devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7004, Issue , 2008, Pages

  Iannuzzi, D ^a   De Man, S ^a   Alberts, C J ^a   Berenschot, J W ^b   Elwenspoek, M C ^b   Said, A A ^c   Dugan, M ^c  

^a VU UNIVERSITY AMSTERDAM   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c TRANSLUME INC   (United States)

Author keywords

Atomic force microscopy; Biochemical sensors; Femtosecond machining; Fiber top devices; Refractive index

Indexed keywords

COMPUTER NETWORKS; DETECTORS; FIBER OPTICS; OPTICAL FIBERS; OPTICAL MATERIALS; OPTICAL SENSORS; SENSORS; TECHNOLOGY;

(OTDR) TECHNOLOGY; GENERAL (CO); INTERNATIONAL CONFERENCES; MICRO MACHINED DEVICES; OPTICAL FIBRE SENSORS;

FIBERS;

EID: 45549090453     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.787087     Document Type: Conference Paper

References (7)

1. D. Iannuzzi et al., "Monolithic fiber-top sensor for critical environments and standard applications", Appl. Phys. Lett. 88, 053501 (2006).
2. D. Rugar et al., "Force microscope using a fiber-optic displacement sensor", Rev. Sci. Instr. 59, 2337-40 (1988).
3. S. Deladi et al., "Carving fiber-top optomechanical transducers from optical fibers", J. Micromech. Microeng. 16, 886-9 (2006).
4. D. Iannuzzi et al., "Fibre-top cantilevers: design, fabrication, and applications", Meas. Sci. Techn. 18, 3247-52 (2007).
5. D. Iannuzzi et al., "A fiber-top hydrogen Sensor", Sensors Act. B121, 706-8 (2007).
6. D. Iannuzzi et al., "Fiber-top atomic force microscope", Rev. Sci. Instr. 77, 106105 (2006).
7. A. A. Said, M. Dugan, S. de Man, and D. Iannuzzi, "Carving fiber-top cantilevers with femtosecond laser micromachining", submitted to J. Micromech. Microeng.