-
1
-
-
0033897055
-
Materials issues in microelectromechanical systems (MEMS)
-
Jan
-
S. M Spearing, "Materials issues in microelectromechanical systems (MEMS)," Acta Mater., vol. 48, no. 1, pp. 179-196, Jan. 2000.
-
(2000)
Acta Mater
, vol.48
, Issue.1
, pp. 179-196
-
-
Spearing, S.M.1
-
2
-
-
0036646254
-
Time constant and lateral resonances of thermal vertical bimorph actuators
-
H. Sehr, I. S Tomlin, B. Huang, S. P. Beeby, A. G. R. Evans, A. Brunnschweiler, G. J. Ensell, C. G. J. Schabmueller, and T. E. G. Niblock, "Time constant and lateral resonances of thermal vertical bimorph actuators," J. Micromech. Microeng., vol. 12, no. 4, pp. 410-413, 2002.
-
(2002)
J. Micromech. Microeng
, vol.12
, Issue.4
, pp. 410-413
-
-
Sehr, H.1
Tomlin, I.S.2
Huang, B.3
Beeby, S.P.4
Evans, A.G.R.5
Brunnschweiler, A.6
Ensell, G.J.7
Schabmueller, C.G.J.8
Niblock, T.E.G.9
-
3
-
-
0033884028
-
Self-buckling of micromachined beams under resistive heating
-
M. Chiao and L. Lin, "Self-buckling of micromachined beams under resistive heating," J. Microelectromech. Syst., vol. 9, no. 1, pp. 146-151, 2000.
-
(2000)
J. Microelectromech. Syst
, vol.9
, Issue.1
, pp. 146-151
-
-
Chiao, M.1
Lin, L.2
-
4
-
-
22544458530
-
Fabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcages
-
Aug
-
J. K. Luo, J. H. He, Y. Q. Fu, A. J. Flewitt, S. M. Spearing, N. A. Fleck, and W. I. Milne, "Fabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcages," J. Micromech. Microeng., vol. 15, no. 8, pp. 1406-1413, Aug. 2005.
-
(2005)
J. Micromech. Microeng
, vol.15
, Issue.8
, pp. 1406-1413
-
-
Luo, J.K.1
He, J.H.2
Fu, Y.Q.3
Flewitt, A.J.4
Spearing, S.M.5
Fleck, N.A.6
Milne, W.I.7
-
5
-
-
3142664529
-
A polymeric micro gripper with integrated thermal actuators
-
Jul
-
N. T. Nguyen, S. S. Ho, and C. L. N. Low, "A polymeric micro gripper with integrated thermal actuators," J. Micromech. Microeng., vol. 14, no. 7, pp. 969-974, Jul. 2004.
-
(2004)
J. Micromech. Microeng
, vol.14
, Issue.7
, pp. 969-974
-
-
Nguyen, N.T.1
Ho, S.S.2
Low, C.L.N.3
-
6
-
-
21744453062
-
Wireless bimorph micro-actuators by pulsed laser heating
-
L. H. Han and S. Chen, "Wireless bimorph micro-actuators by pulsed laser heating," Sens. Actuators A, Phys., vol. 121, no. 1, pp. 35-43, 2005.
-
(2005)
Sens. Actuators A, Phys
, vol.121
, Issue.1
, pp. 35-43
-
-
Han, L.H.1
Chen, S.2
-
7
-
-
27944455145
-
Design analysis of heated atomic force microscope cantilevers for nanotopography measurements
-
Dec
-
W. P. King, "Design analysis of heated atomic force microscope cantilevers for nanotopography measurements," J. Micromech. Microeng., vol. 15, no. 12, pp. 2441-2448, Dec. 2005.
-
(2005)
J. Micromech. Microeng
, vol.15
, Issue.12
, pp. 2441-2448
-
-
King, W.P.1
-
8
-
-
33746792448
-
The selection of mechanical actuators based on performance indices
-
J. E. Huber, N. A. Fleck, and M. F. Ashby, "The selection of mechanical actuators based on performance indices," Proc. R. Soc. Lond. A, Math. Phys. Sci., vol. 453, no. 1965, pp. 2185-2205, 1997.
-
(1997)
Proc. R. Soc. Lond. A, Math. Phys. Sci
, vol.453
, Issue.1965
, pp. 2185-2205
-
-
Huber, J.E.1
Fleck, N.A.2
Ashby, M.F.3
-
9
-
-
21044443376
-
MEMS actuators and sensors: Observation on their performance and selection for purpose
-
D. J. Bell, T. J. Lu, N. A. Fleck, and S. M. Spearing, "MEMS actuators and sensors: Observation on their performance and selection for purpose," J. Micromech. Microeng., vol. 15, no. 7, pp. S153-S164, 2005.
-
(2005)
J. Micromech. Microeng
, vol.15
, Issue.7
-
-
Bell, D.J.1
Lu, T.J.2
Fleck, N.A.3
Spearing, S.M.4
-
10
-
-
67649961403
-
Materials selection and design of microelectrothermal actuators
-
London, U.K
-
S. Prasanna and S.M. Spearing, "Materials selection and design of microelectrothermal actuators," in Proc. IET Seminar MEMS Sens. Actuators, London, U.K., 2006, pp. 260-265.
-
(2006)
Proc. IET Seminar MEMS Sens. Actuators
, pp. 260-265
-
-
Prasanna, S.1
Spearing, S.M.2
-
11
-
-
24944442827
-
3D free space thermally actuated micro mirror device
-
J. Singh, T. Gan, A. Agarwal, M. Raj, and S. Liw, "3D free space thermally actuated micro mirror device," Sens. Actuators A, Phys. vol. 123-124, no. 1, pp. 468-475, 2005.
-
(2005)
Sens. Actuators A, Phys
, vol.123-124
, Issue.1
, pp. 468-475
-
-
Singh, J.1
Gan, T.2
Agarwal, A.3
Raj, M.4
Liw, S.5
-
12
-
-
0343930709
-
Bistable micromechanical fibre optic switches on silicon with thermal actuators
-
Jan
-
M. Hoffmann, P. Kopka, and E. Voges, "Bistable micromechanical fibre optic switches on silicon with thermal actuators," Sens. Actuators A, Phys., vol. 78, no. 1, pp. 28-35, Jan. 1999.
-
(1999)
Sens. Actuators A, Phys
, vol.78
, Issue.1
, pp. 28-35
-
-
Hoffmann, M.1
Kopka, P.2
Voges, E.3
-
13
-
-
0001764380
-
Analysis of bimetal thermostats
-
S. Timoshenko, "Analysis of bimetal thermostats," J. Opt. Soc. Amer., vol. 11, no. 3, pp. 233-255, 1925.
-
(1925)
J. Opt. Soc. Amer
, vol.11
, Issue.3
, pp. 233-255
-
-
Timoshenko, S.1
-
14
-
-
34147151769
-
Materials selection and design of microelectrothermal bimaterial actuators
-
Apr
-
S. Prasanna and S.M. Spearing, "Materials selection and design of microelectrothermal bimaterial actuators," J. Microelectromech. Syst., vol. 16, no. 2, pp. 248-259, Apr. 2007.
-
(2007)
J. Microelectromech. Syst
, vol.16
, Issue.2
, pp. 248-259
-
-
Prasanna, S.1
Spearing, S.M.2
-
15
-
-
0003397084
-
-
9th ed. New York: McGraw-Hill
-
J. P. Holman, Heat Transfer, 9th ed. New York: McGraw-Hill, 2004, pp. 133-135.
-
(2004)
Heat Transfer
, pp. 133-135
-
-
Holman, J.P.1
-
16
-
-
0016597193
-
The electrical properties of polycrystalline silicon films
-
J. Y. W. Seto, "The electrical properties of polycrystalline silicon films," J. Appl. Phys., vol. 48, no. 12, pp. 5247-5254, 1975.
-
(1975)
J. Appl. Phys
, vol.48
, Issue.12
, pp. 5247-5254
-
-
Seto, J.Y.W.1
-
17
-
-
0012112950
-
-
Edupack Ver.4.6.1, GRANTA design Ltd
-
Cambridge Engineering Selector, 2006. Edupack Ver.4.6.1, GRANTA design Ltd.
-
(2006)
Cambridge Engineering Selector
-
-
-
18
-
-
0024894183
-
Characteristics of reactive magnetron sputtered ZnO films
-
G. Perluzzo, C. K. Jen, and E. L. Adler, "Characteristics of reactive magnetron sputtered ZnO films," in Proc. IEEE Ultrason. Symp., 1989, pp. 373-376.
-
(1989)
Proc. IEEE Ultrason. Symp
, pp. 373-376
-
-
Perluzzo, G.1
Jen, C.K.2
Adler, E.L.3
-
19
-
-
0942300056
-
Imprinting polymer film on patterned substrates
-
L. Tan, Y. P. Kong, L. R. Bao, X. D. Huang, L. J. Guo, S. W Pang, and A. F. Yee, "Imprinting polymer film on patterned substrates," J. Vac. Sci. Technol. B, Microelectron., vol. 21, no. 6, pp. 2742-2748, 2003.
-
(2003)
J. Vac. Sci. Technol. B, Microelectron
, vol.21
, Issue.6
, pp. 2742-2748
-
-
Tan, L.1
Kong, Y.P.2
Bao, L.R.3
Huang, X.D.4
Guo, L.J.5
Pang, S.W.6
Yee, A.F.7
-
20
-
-
0031171986
-
Pulsed laser deposition of diamond-like carbon wear protective coatings
-
Jun
-
A. A. Voevodin, M. S. Donley, and J. S. Zabinski, "Pulsed laser deposition of diamond-like carbon wear protective coatings," Surf. Coat. Technol., vol. 92, no. 1, pp. 42-49, Jun. 1997.
-
(1997)
Surf. Coat. Technol
, vol.92
, Issue.1
, pp. 42-49
-
-
Voevodin, A.A.1
Donley, M.S.2
Zabinski, J.S.3
-
21
-
-
0038166605
-
Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating
-
Feb
-
J. Schwan et al., "Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating," J. Appl. Phys., vol. 79, no. 3, pp. 1416-1422, Feb. 1996.
-
(1996)
J. Appl. Phys
, vol.79
, Issue.3
, pp. 1416-1422
-
-
Schwan, J.1
-
22
-
-
0001316340
-
Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon
-
A. C. Ferrari et al., "Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon," J. Appl. Phys. vol. 85, no. 10, pp. 7191-7197, 1999.
-
(1999)
J. Appl. Phys
, vol.85
, Issue.10
, pp. 7191-7197
-
-
Ferrari, A.C.1
-
23
-
-
0012038163
-
The properties of aluminium thin films sputter deposited at elevated temperatures
-
M. Inoue, K. Hashizume, and H. Tsuchikawa, "The properties of aluminium thin films sputter deposited at elevated temperatures," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 6, no. 3, pp. 1636-1639, 1988.
-
(1988)
J. Vac. Sci. Technol. A, Vac. Surf. Films
, vol.6
, Issue.3
, pp. 1636-1639
-
-
Inoue, M.1
Hashizume, K.2
Tsuchikawa, H.3
-
24
-
-
0024123113
-
Mechanical stress as a function of temperature in aluminium films
-
Dec
-
D. S. Gardner and P. A. Flinn, "Mechanical stress as a function of temperature in aluminium films," IEEE Trans. Electron Devices, vol. 35, no. 12, pp. 2160-2169, Dec. 1988.
-
(1988)
IEEE Trans. Electron Devices
, vol.35
, Issue.12
, pp. 2160-2169
-
-
Gardner, D.S.1
Flinn, P.A.2
-
26
-
-
0004153984
-
-
4th ed. New York: Macmillan
-
A. J. Chapman, Heat Transfer, 4th ed. New York: Macmillan, 1984, pp. 210-219.
-
(1984)
Heat Transfer
, pp. 210-219
-
-
Chapman, A.J.1
-
27
-
-
0032049451
-
Active control of streamwise vortices and streaks in boundary layers
-
S. A. Jacobson and W. C. Reynolds, "Active control of streamwise vortices and streaks in boundary layers," J. Fluid Mech., vol. 360, no. 1, pp. 179-211, 1998.
-
(1998)
J. Fluid Mech
, vol.360
, Issue.1
, pp. 179-211
-
-
Jacobson, S.A.1
Reynolds, W.C.2
-
28
-
-
0036239213
-
Active control of streak structures in wall turbulence using an actuator array producing inclined wavy disturbances
-
Jan
-
T. Segawa, Y. Kawaguchi, Y. Kikushima, and H. Yoshida, "Active control of streak structures in wall turbulence using an actuator array producing inclined wavy disturbances," J. Turbul., vol. 3, no. 1, pp. 1-14, Jan. 2002.
-
(2002)
J. Turbul
, vol.3
, Issue.1
, pp. 1-14
-
-
Segawa, T.1
Kawaguchi, Y.2
Kikushima, Y.3
Yoshida, H.4
-
29
-
-
33847306500
-
An electrostatically actuated valve for turbulent boundary layer control
-
J. R. Frutos et al., "An electrostatically actuated valve for turbulent boundary layer control," Proc. IEEE Sensors, pp. 82-88, 2005.
-
(2005)
Proc. IEEE Sensors
, pp. 82-88
-
-
Frutos, J.R.1
|