An integrated 2-D active optical fiber manipulator with microfluidic channel for optical trapping and manipulation

Journal of Microelectromechanical Systems

Volumn 17, Issue 3, 2008, Pages 548-557

  Lai, Chia Wei ^a   Hsiung, Suz Kai ^a   Chen, Yin Quan ^b   Chiou, Arthur ^b   Lee, Gwo Bin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL YANG MING UNIVERSITY   (Taiwan)

Author keywords

Microcoupler; Microelectromechanical systems (MEMS); Microfluidics chip; Moving wall; Optical detection; Optical trappers

Indexed keywords

ATMOSPHERIC PRESSURE; COMPUTER NETWORKS; ELECTROMECHANICAL DEVICES; FABRICATION; FIBER OPTICS; FIBERS; FLEXIBLE STRUCTURES; FLUIDICS; MANIPULATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; NANOFLUIDICS; OPTICAL ENGINEERING; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL MATERIALS; PRESSURE; TECHNOLOGY;

(060.2410) FIBERS; AIR CHAMBERS; AIR PRESSURES; AND DETECTION; APPLIED PRESSURE; DEFLECTION (OVALIZATION); FIBER CHANNEL (FC); FIBER OPTICAL; MAXIMUM DISPLACEMENT; MEMBRANE STRUCTURING; MICRO FLUIDIC CHANNELS; MICROELECTROMECHANICAL-SYSTEMS (MEMS) TECHNOLOGY; MICROFLUIDIC ENVIRONMENT; ON CHIPS; OPTICAL (PET) (OPET); OPTICAL MANIPULATION; OPTICAL TRAPPING; PNEUMATIC CHAMBERS; REAL TIME; TWO-AXIS;

OPTICAL FIBER COUPLING;

EID: 45449087292     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.924271     Document Type: Article

References (29)

1. M. L. Chabinyc, D. T. Chiu, J. C. McDonald, A. D. Stroock, J. F. Christian, A. M. Karger, and G. M. Whitesides, "An integrated fluorescence detection system in poly(dimethylsiloxane) for microfluidic applications," Anal. Chem., vol. 73, no. 18, pp. 4491-4498, Sep. 2001.
2. C. T. Lim, E. H. Zhou, A. Li, S. R. K. Vedula, and H. X. Fu, "Experimental techniques for single cell and single molecule biomechanics," Mater. Sci. Eng. C, Biomim. Mater., Sens. Syst., vol. 26, no. 8, pp. 1278-1288, Sep. 2006.
3. M. C. Wu, O. Solgaard, and J. E. Ford, "Optical MEMS for lightwave communication," J. Lightw. Technol., vol. 24, no. 12, pp. 4433-4454, Dec. 2006.
4. H. Becker and L. E. Locascio, "Polymer microfluidic devices," Talanta, vol. 56, no. 2, pp. 267-287, Feb. 2002.
5. Z. H. Liang, N. Chiem, G. Ocvirk, T. Tand, K. Fluri, and D. J. Harrison, "Microfabrication of a planar absorbance and fluorescence cell for integrated capillary electrophoresis devices," Anal. Chem., vol. 68, no. 6, pp. 1040-1046, 1996.
6. C.-H. Lin and G.-B. Lee, "Micromachined flow cytometers with embedded etched optic fibers for optical detection," J. Micromech. Microeng. vol. 13, no. 3, pp. 447-453, Apr. 2003.
7. A. Grosse, M. Grewe, and H. Fouckhardt, "Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices," J. Micromech. Microeng., vol. 11, no. 3, pp. 257-262, May 2001.
8. R. Hauffe, U. Siebel, K. Petermann, R. Moosburger, J.-R. Kropp, and F. Arndt, "Methods for passive fiber chip coupling of integrated optical devices," IEEE Trans. Adv. Packag., vol. 24, no. 4, pp. 450-455, Nov. 2001.
9. Y.-C. Tung, M. Zhang, C.-T. Lin et al., "PDMS-based opto-fluidic micro flow cytometer with two-color, multi-angle fluorescence detection capability using PIN photodiodes," Sens. Actuators B, Chem., vol. 98, no. 2/3, pp. 356-367, Mar. 2004.
10. B. Li, H. Wirz, and A. Sharon, "Optimizing fiber coupling with a quasipassive microoptical bench," J. Microelectromech. Syst., vol. 14, no. 6, pp. 1339-1346, Dec. 2005.
11. S.-I. Chang and J.-B. Yoon, "A 3-D planar microlens for an effective monolithic optical interconnection system," IEEE Photon. Technol. Lett., vol. 18, no. 7, pp. 814-816, Apr. 2006.
12. L. Chen, W. Rong, L. Sun, and H. Xie, "Micromanipulation robot for automatic fiber alignment," in Proc. IEEE Int. Conf. Mechatron. Autom., 2005, pp. 1756-1759.
13. M. L. Culpepper and G. Anderson, "Design of a low-cost nanomanipulator which utilizes a monolithic, spatial compliant mechanism," Precis. Eng., vol. 28, no. 4, pp. 469-482, Oct. 2004.
14. J. S. D. Popa and H. Stephanou, "Model based automatic fiber alignment," in Proc. Fiber Opt. Autom. Conf., 2002, pp. 415-420.
15. R. Jebens, W. Trimmer, and J. Walker, "Microactuators for aligning optical fibers," Sens. Actuators, vol. 20, no. 1/2, pp. 65-73, Nov. 1989.
16. R. R. A. Syms, H. Zou, J. Yao, D. Uttamchandani, and J. Stagg, "Scalable electrothermal MEMS actuator for optical fibre alignment," J. Micromech. Microeng., vol. 14, no. 12, pp. 1633-1639, Aug. 2004.
17. A. Unamuno, J. Yao, and D. Uttamchandani, "Alignment and fixing of fiber optics based on electrothermal MEMS actuators," IEEE Photon. Technol. Lett., vol. 17, no. 4, pp. 816-818, Apr. 2005.
18. K. Ishikawa, J. Zhang, A. Tuantranont, V. M. Bright, and Y.-C. Lee, "An integrated micro-optical system for VCSEL-to-fiber active alignment," Sens. Actuators A, Phys., vol. 103, no. 1/2, pp. 109-115, Jan. 2003.
19. A. Ashkin, "Acceleration and trapping of particles by radiation pressure," Phys. Rev. Lett., vol. 24, no. 4, pp. 156-159, Jan. 1970.
20. A. Constable, J. Kim, J. Mervis, F. Zarinetchi, and M. Prentiss, "Demonstration of a fiber-optical light-force trap," Opt. Lett., vol. 18, no. 21, pp. 1867-1869, Nov. 1993.
21. S. Monajembashi and K. O. Greulich, "Trapping of dielectric particles and cells by a fiber-coupled laser trap," Proc. SPIE, vol. 2926, pp. 240-250, 1996.
22. A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm, and S. Chu, "Observation of a single-beam gradient force optical trap for dielectric particles," Opt. Lett., vol. 11, no. 5, pp. 288-290, May 1986.
23. J. Guck, R. Ananthakrishnan, T. J. Moon, C. C. Cunningham, and J. Käs, "Optical deformability of soft biological dielectrics," Phys. Rev. Lett., vol. 84, no. 23, pp. 5451-5454, Jun. 2000.
24. S.-K. Hsiung, C.-T. Chen, and G.-B. Lee, "Micro-droplet formation utilizing microfluidic flow focusing and controllable moving-wall chopping techniques," J. Micromech. Microeng., vol. 16, no. 11, pp. 2403-2410, Sep. 2006.
25. M. A. Unger, H. P. Chou, T. Thorsen, A. Scherer, and S. R. Quake, "Monolithic microfabricated valves and pumps by multilayer soft lithography," Science, vol. 288, no. 5463, pp. 113-116, Apr. 2000.
26. F. M. Sasoglu, A. J. Bohl, and B. E. Layton, "Design and microfabrication of a high-aspect-ratio PDMS microbeam array for parallel nanonewton force measurement and protein printing," J. Micromech. Microeng., vol. 17, no. 3, pp. 623-632, Feb. 2007.
27. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells New York: McGraw-Hill, 1959.
28. C. H.Wang and G.-B. Lee, "Automatic bio-sampling chips integrated with micro-pumps and micro-valves for disease detection," Biosens. Bioelectron., vol. 21, no. 3, pp. 419-425, Sep. 2005.
29. J. Guck, R. Ananthakrishnan, C. C. Cunningham et al., "Stretching biological cells with light," J. Phys., Condens. Matter, vol. 14, no. 19, pp. 4843-4856, May 2002.