Observation of splitting HOLZ lines around shallow trench isolation structures by convergent beam electron diffraction

Microscopy and Microanalysis

Volumn 10, Issue SUPPL. 2, 2004, Pages 584-585

  Hou, Vincent ^a   Li, Du ^a  

^a MICRON TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4544378901     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S143192760488022X     Document Type: Conference Paper

References (9)

1. A. Armigliato et al., Appl. Phys. Lett., 82 (2003) 2173.
2. CBED module with AnalySIS® software, Soft Imaging System, http://www.soft-imaging.net
3. C.J. Humphreys et al., Ultramicroscopy, 26 (1988) 13.
4. P.M. Kelly et al., Phys. Stat., A31 (1975) 771.
5. S.M. Allen, Phil. Mag. A, 43 (1981) 325.
6. R.W. Carpenter and J.C.H. Spence, Acta Cryst, A38 (1982) 55.
7. C.T. Chou, L.J. Zhao, and T. Ko, Phil. Mag. A, 59 (1989) 1221.
8. H. Zou, X. Yao, and R. Wang, Acta Cryst., A47 (1991) 490.
9. C. Stuer et al., J Electrochem. Soc., G597 (2001) 169.