Thickness measurement of GaN film based on transmission spectra

Wuli Xuebao/Acta Physica Sinica

Volumn 53, Issue 4, 2004, Pages 1243-1246

  Zhang, Jin Cheng ^a   Hao, Yue ^a   Li, Pei Xian ^a   Fan, Long ^a   Feng, Qian ^a  

^a XIDIAN UNIVERSITY   (China)

Author keywords

GaN; Thickness measurement; Transmission spectra

Indexed keywords

EID: 4544370730     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)