Effect of arc current on the properties of TiN films deposited by multi-arc ion plating

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 33, Issue SUPPL., 2004, Pages 132-136

  Shi, Xinwei ^a   Li, Chunming ^a   Qiu, Wanqi ^a   Liu, Zhengyi ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Arc current; Ion plating; Macro particle; Titanium nitride

Indexed keywords

EID: 4544366155     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)