Microstructural features of DC sputtered vanadium oxide thin films

Wuli Xuebao/Acta Physica Sinica

Volumn 53, Issue 6, 2004, Pages 1956-1960

  Pan, Meng Xiao ^a,b   Cao, Xing Zhong ^a,c   Li, Yang Xian ^a   Wang, Bao Yi ^c   Xue, De Sheng ^a   Ma, Chuang Xin ^a   Zhou, Chun Lan ^a   Wei, Long ^a  

^a INSTITUTE OF HIGH ENERGY PHYSICS   (China)

^b HEBEI UNIVERSITY OF TECHNOLOGY   (China)

^c LANZHOU UNIVERSITY   (China)

Author keywords

DC magnetron sputtering; Microstructure; Preferred orientation; Thin films of vanadium oxides

Indexed keywords

EID: 4544353837     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)