Indium nano-dot arrays formed by field-induced deposition with a Nano-Jet Probe for site-controlled InAs/GaAs quantum dots

Thin Solid Films

Volumn 464-465, Issue , 2004, Pages 233-236

  Ohkouchi, S ^a   Nakamura, Y ^a   Nakamura, H ^a   Asakawa, K ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Atomic force microscope; Nano probe; Quantum dot; Site control

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; MOLECULAR BEAM EPITAXY; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC DEVICES; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; ULTRAHIGH VACUUM;

FOCUSED ION BEAM (FEB); NANO-DOT FORMATION; NANO-PROBE; SITE CONTROL;

SEMICONDUCTOR QUANTUM DOTS;

EID: 4544325511     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.06.047     Document Type: Article

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