Microstructure and properties of tetrahedral amorphous carbon films deposited by filtered arc with accelerating at different energetic grades

Wuli Xuebao/Acta Physica Sinica

Volumn 53, Issue 4, 2004, Pages 1150-1156

  Zhu, Jia Qi ^a   Wang, Jing He ^a   Meng, Song He ^a   Han, Jie Cai ^a   Zhang, Lian Sheng ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b CHENGDE PETROLEUM COLLEGE   (China)

Author keywords

Energetic grade; Filtered cathodic vacuum arc; Tetrahedral amorphous carbon (ta C)

Indexed keywords

EID: 4544278671     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (33)