Modeling electrodeposition in LIGA micro-fabrication using an arbitrary Lagrangian-Eulerian formulation for moving-boundary tracking with repeated re-meshing

Computational and Experimental Methods

Volumn 10, Issue , 2004, Pages 245-255

  Chen, K S ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY LAYER FLOW; COMPUTER SIMULATION; CURRENT DENSITY; ELECTROCHEMISTRY; ELECTROLYTES; EQUATIONS OF MOTION; FINITE ELEMENT METHOD; LAGRANGE MULTIPLIERS; MOLDING; POISSON EQUATION; SURFACE PHENOMENA; THERMODYNAMICS; X RAY LITHOGRAPHY;

LAGRANGIAN-EULERIAN FORMULATION; MESH-MOTION EQUATIONS; MICROFABRICATION; SURFACE DEPOSITION;

ELECTRODEPOSITION;

EID: 4544275359     PISSN: 14667266     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (8)

1. Griffiths, S. K., Nilson, R. H., Ting, A., Bradshaw, R. W., Bonivert, W. D., and Hruby, J. M., Modeling electrodeposition for LIGA microdevice fabrication, Microsystem Technologies, Vol. 4, pp. 98 - 101 (1998).
2. Wheeler, D., Josell, D., and Moffat, T. P., Modeling superconformal electrodeposition using the level set method, Electrochem. Soc. J., 150, pp. C302.
3. Schunk, P. R., Sackinger, P. A., Rao, R. R., Chen, K. S., Cairncross, R. A., Baer, T. A., Labreche, D. A., Goma 2.0 - a full-Newton finite element program for free and moving boundary problems with coupled fluid/solid momentum, energy, mass, and chemical species transport: user's guide, SAND97-2404 (1997).
4. CUBIT, Version 8.0, Sandia National Laboratories (2003), URL: http://endo.sandia.gov/cubit.
5. Wellman, G. W., MAPVAR - a computer program to transfer solution data between finite element meshes, SAND97-0466 (1999).
6. Newman, J. S., Electrochemical Systems, Second Edition, Prentice Hall, Inc., Englewood Cliffs, New Jersey (1991).
7. Sackinger, P. A., Schunk, P. R., and Rao, R. R., A Newton-Raphson pseudo-solid domain mapping technique for free and moving boundary problems: a finite-element implementation, J. Comp. Phys., 125, p. 83-103 (1995).
8. Bird, R. B., Stewart, W. E., and Lightfoot, E. N., Transport Phenomena, Second Edition, John Wiley & Sons, New York (2002).