Study on the sputtering mechanism of SiO2 irradiated with MeV Si ions

Wuli Xuebao/Acta Physica Sinica

Volumn 53, Issue 5, 2004, Pages 1445-1449

  Xue, Jian Ming ^a,b   Ninomiya, S ^b   Imanishi, N ^b  

^a PEKING UNIVERSITY   (China)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

KED; Sputtering; TOF; Yield

Indexed keywords

EID: 4544266029     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)