Wet resist strip capability vs. implant energy

ECS Transactions

Volumn 11, Issue 2, 2007, Pages 197-202

  Christenson, K K ^a  

^a FSI International   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; SEMICONDUCTOR DEVICE MANUFACTURE;

EDGE BEAD; IMPLANT ENERGY; WET CHEMISTRY; WET STRIPS;

SEMICONDUCTOR DEVICES;

EID: 45249110203     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2779379     Document Type: Conference Paper

References (2)

1. SRIM-2006.01, J.F Ziegler, M.D Ziegler, and J.P Biersack, http://www.srim.org.
2. J F Ziegler, I P. Biersack and U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York (1985).