A review of microelectronic manufacturing applications using DMSO-based chemistries

ECS Transactions

Volumn 11, Issue 2, 2007, Pages 227-234

  Kvakovszky, George ^a   McKim, Artie ^a   Moore, John ^b  

^a Gaylord Chemical Corp   (United States)

^b SAFER Systems LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; DIMETHYL SULFOXIDE; FLIP CHIP DEVICES; LITHOGRAPHY; MICROELECTRONICS; POLYMERS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES;

DIMETHYL SULFOXIDE (DMSO); HIGH DIELECTRIC CONSTANTS; INORGANIC SALTS; INORGANIC SPECIES; METAL FEATURES; MICROELECTRONIC MANUFACTURING; RESIST STRIPPING; SAFETY CLASSIFICATION;

ORGANIC SOLVENTS;

EID: 45249105279     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2779383     Document Type: Conference Paper

References (14)

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