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Ultramicroscopy

Volumn 108, Issue 8, 2008, Pages 707-711

Coupled lateral bending-torsional vibration sensitivity of atomic force microscope cantilever

(2) Lee, Haw Long a Chang, Win Jin a

a KUN SHAN UNIVERSITY (Taiwan)

Author keywords

Atomic force microscope cantilever; Coupled lateral bending torsional vibration; Resonant frequency; Sensitivity

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; EXTREME ULTRAVIOLET LITHOGRAPHY; IMAGING TECHNIQUES; LATTICE VIBRATIONS; MICROSCOPES; MICROSCOPIC EXAMINATION; NATURAL FREQUENCIES; OPTICAL INSTRUMENTS; RESONANCE; SCANNING PROBE MICROSCOPY; STIFFNESS; VIBRATING CONVEYORS; VIBRATIONS (MECHANICAL); VIBRATORS;

AFM CANTILEVERS; ATOMIC FORCE MICROSCOPE (AFM); CANTILEVER MODES; CONSTANT VALUE; CONTACT STIFFNESS; ELSEVIER (CO); HIGH ORDER; LATERAL BENDING; LATERAL CONTACT; RESONANCE FREQUENCIES; RESONANT FREQUENCIES; TORSIONAL VIBRATIONS; VIBRATION FREQUENCIES; VIBRATION MODES;

PHOTORESISTS;

ARTICLE; ATOMIC FORCE MICROSCOPE CANTILEVER; CALIBRATOR; FREQUENCY ANALYSIS; MICROSCOPE; SENSITIVITY ANALYSIS; VIBRATION; VIBRATION SENSE;

EID: 45249084986 PISSN: 03043991 EISSN: None Source Type: Journal
DOI: 10.1016/j.ultramic.2007.10.012 Document Type: Article

Times cited : (49)

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