Temporal and spectral analysis of laser induced plasma in the ablation process of flexible printed circuit board

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6879, Issue , 2008, Pages

  Ryoo, Hoon C ^a   Kim, Seok ^a   Hahn, Jae W ^a  

^a Yonsei University   (South Korea)

Author keywords

Bremsstrahlung continuum emission; Flexible printed circuit board (FPCB); Laser induced breakdown spectroscopy (LIBS); Transition layer

Indexed keywords

CONDUCTIVE FILMS; COPPER; ELECTROMAGNETIC WAVE EMISSION; ELECTROMAGNETIC WAVES; ELECTRONIC EQUIPMENT; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS INDUSTRY; EMISSION SPECTROSCOPY; EXCIMER LASERS; GAS LASERS; KRYPTON; LASER PRODUCED PLASMAS; LASER SPECTROSCOPY; LASERS; MICROELECTRONICS; PHOTONICS; PHOTONS; PLASMA (HUMAN); PLASMAS; PRINTED CIRCUIT BOARDS; PRINTED CIRCUIT MANUFACTURE; PRINTED CIRCUITS; PULSED LASER DEPOSITION; SIGNAL INTERFERENCE; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; SPECTRUM ANALYZERS; SPEECH;

(E ,3E) PROCESS; 3 DIMENSIONAL; ABLATION MECHANISMS; APPLIED (CO); COPPER SHEETS; CORE ELEMENTS; FILM SUBSTRATES; FLEXIBLE PRINTED CIRCUIT BOARD (FPCB); HIGH-DENSITY; KRF EXCIMER LASERS; LASER-INDUCED BREAKDOWN SPECTROSCOPY (LIBS); LASER-INDUCED PLASMAS; MULTIPLE STRUCTURES; PRECISION CONTROL; SPECTRAL ANALYSES; SPECTRAL BEHAVIORS; SPECTRAL EMISSION LINES; TRANSITION LAYERS;

ABLATION;

EID: 44949214731     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.762025     Document Type: Conference Paper

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