A CMOS microsystem combining magnetic actuation and in-situ optical detection of microparticles

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2493-2496

  Lehmann, U ^a   Sergio, M ^b   Pietrocola, S ^a   Niclass, C ^b   Charbon, E ^b   Gijs, M A M ^a  

^a Institute of Microelectronics and Microsystems   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

CMOS; Magnetic actuation; Optical detection; Single photon avalanche diode

Indexed keywords

ACTUATORS; AVALANCHE DIODES; AVALANCHES (SNOWSLIDES); MAGNETIC FIELDS; MAGNETIC MATERIALS; MICROSYSTEMS; NANOFLUIDICS; OPTICAL SENSORS; PHOTONS; SENSORS; SNOW; TRANSDUCERS;

CMOS; DIFFERENT SIZES; IN-SITU; INCIDENT LIGHT; INTERNATIONAL CONFERENCES; MAGNETIC ACTUATION; MAGNETIC MICROPARTICLES; MAGNETIC PARTICLES; MICRO CAPILLARIES; MICRO FLUIDIC SYSTEMS; MICRO-PARTICLES; OPTICAL DETECTION; PHOTON COUNTING; SINGLE PHOTON AVALANCHE DIODE; SINGLE-PHOTON AVALANCHE DIODES; SOLID-STATE SENSORS;

MAGNETIC DOMAINS;

EID: 44849134238     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300677     Document Type: Conference Paper

References (6)

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3. R. Wirix-Speetjens, W. Fyen, K. D. Xu, J. De Boeck, and G. Borghs, "A force study of on-chip magnetic particle transport based on tapered conductors," IEEE Trans. Magn., vol. 41, pp. 4128-4133, 2005.
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5. A. Rida, V. Fernandez, and M. A. M. Gijs, "Long-range transport of magnetic microbeads using simple planar coils placed in a uniform magnetostatic field," Appl. Phys. Lett., vol. 83, pp. 2396, 2003.
6. C. Niclass, M. Sergio, and E. Charbon, "A single photon avalanche diode array fabricated in 0.35-μm CMOS and based on an event-driven readout for TCSPC experiments", Proc. SPIE 6372, 63720S, 2006.