Monolithic integration of micro-channel on disposable flow sensors for medical applications

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 29-32

  Billat, S ^a   Kliche, K ^a   Gronmaier, R ^a   Nommensen, P ^a   Auber, J ^a   Hedrich, F ^a   Zengerle, R ^a  

^a Institute for Micromachining and Information Technology   (Germany)

Author keywords

Adhesive free packaging; Flow sensor; Integration of micro channel

Indexed keywords

ACTUATORS; MEDICAL APPLICATIONS; MICROSYSTEMS; MONOLITHIC INTEGRATED CIRCUITS; STANDARDS; TECHNOLOGY; TRANSDUCERS;

ADHESIVE-FREE PACKAGING; BOND PROCESSES; FLOW SENSORS; FLOW-SENSOR; INTEGRATION OF MICRO-CHANNEL; INTERNATIONAL CONFERENCES; KOH ETCHING; MICRO CHANNELS; MICRO FLOW CHANNELS; MONOLITHIC INTEGRATIONS; POLYDIMETHYLSILOXANE PDMS; SOLID-STATE SENSORS;

SENSORS;

EID: 44849128664     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300064     Document Type: Conference Paper

References (4)

1. M. Ashauer, H. Scholz, R. Briegel, H. Sandmaier, W. Lang, "Thermal Flow Sensors for very small Flow Rate"; Trandsducer 2001, Munich, 4B208P, 2001
2. F. Völklein, A. Wiegand, V. Baier: Sensors & Actuators A, Vol. 29, pp87-91, 1991.
3. Gehman, Murray, Speldrich; "Reduced Package Size for Medical Flow Sensor", Honeywell (presented at the IMAPS Technical Symposium), 2000.
4. K. Kliche, Diplomarbeit 2006 am HSG-IMIT "Charakterisierung thermischer Strömungssensoren mit integriertem Strömungskanal", 2006.