X-ray emission spectroscopy of solids in the depth-resolution mode: Investigation of a-Si/Al/c-Si nanolayers

Bulletin of the Russian Academy of Sciences: Physics

Volumn 72, Issue 4, 2008, Pages 434-438

  Shulakov, A S ^a   Bukin, S V ^a   Zdanchuk, E V ^a   Tveryanovich, S Yu ^a  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; ATOMIC LAYER DEPOSITION; HETEROJUNCTIONS; NANOSTRUCTURED MATERIALS;

DEPTH-RESOLUTION MODE; EXCITING ELECTRONS; X-RAY EMISSION SPECTROSCOPY;

X RAY SPECTROSCOPY;

EID: 44649174494     PISSN: 10628738     EISSN: None     Source Type: Journal    
DOI: 10.3103/S1062873808040047     Document Type: Article

References (23)

1. Kojnok, J., Szasz, A., Kertesz, L., and Shulakov, A.S., Phys. Status Solidi A, 1982, vol. 72, p. 131.
2. Shulakov, A.S., Nefedov, V.I., Pozdeev, P.P., et al., Poverkhnost, 1986, no. 10, p. 121.
3. Shulakov, A.S., Stepanov, A.P., Atiekh, D., et al., Fiz. Met. Metalloved., 1986, vol. 62, no. 6, p. 1136.
4. Shulakov, A.S., Stepanov, A.P., and Atiekh, D., Fiz. Tverd. Tela (St. Petersburg), 1987, vol. 29, no. 11, p. 3217 [Sov. Phys. Solid State (Engl. Transl.), vol. 29, no. 11, p. 1847].
5. Shulakov, A.S., Cryst. Res. Technol., 1988, no. 23, p. 835.
6. Shulakov, A.S., Filatova, E.O., Stepanov, A.P., and Kozhakhmetov, S.K., Fiz. Tverd. Tela (St. Petersburg), 1990, vol. 32, no. 10, p. 2895.
7. Shulakov, A.S., Gorokhovskii, V.I., Zhiglinskii, A.G., and Fomichev, V.A., Poverkhnost, 1991, no. 2, p. 90.
8. Shulakov, A.S., Szasz, A., Muller, H., and Kirshmar, H., Phys. Status Solidi A, 1992, vol. 133, p. 555.
9. Shulakov, A.S., Stepanov, A.P., and Braiko, A.P., Fiz. Tverd. Tela (St. Petersburg), 1993, vol. 35, no. 8, p. 2135 [Phys. Solid State (Engl. Transl.), vol. 35, no. 8, p. 1061].
10. Filatova, E.O. and Shulakov, A.S., J. Colloid Interface Sci., 1995, vol. 169, p. 361.
11. Shulakov, A.S. and Braiko, A.P., Fiz. Tverd. Tela (St. Petersburg), 1997, vol. 39, no. 11, p. 192.
12. Shulakov, A.S. and Stepanov, A.P., Poverkhnost, 1988, no. 1, p. 146.
13. Shulakov, A.S., Braiko, A.P., Moroz, N.V., and Fomichev, V.A., Fiz. Tverd. Tela (St. Petersburg), 1998, vol. 40, no. 7, p. 1360 [Phys. Solid State (Engl. Transl.), vol. 40, no. 7, p. 1237].
14. Borovskii, I.B. and Rydnik, V.I., Izv. Akad. Nauk SSSR, 1967, vol. 31, no. 6, p. 1009.
15. Zimina, A., Shulakov, A.S., Eizebitt, S., and Eberhardt, W., Surf. Sci. Lett., 2002, vol. 9, no. 1, p. 461.
16. Shulakov, A.S., Braiko, A.P., Bukin, S.V., and Drozd, V.E., Fiz. Tverd. Tela (St. Petersburg), 2004, vol. 46, no. 6, p. 1111 [Phys. Solid State (Engl. Transl.), vol. 46, no. 6, p. 1145].
17. Shulakov, A.S., Braiko, A.P., Bukin, S.V., and Drozd, V.E., Fiz. Tverd. Tela (St. Petersburg), 2004, vol. 46, no. 10, p. 1868 [Phys. Solid State (Engl. Transl.), vol. 46, no. 10, p. 1935].
18. Bukin, S.V. and Shulakov, A.S., Poverkhnost, 2007, no. 2, p. 1.
19. Huebinger, F., Shulakov, A.S., Starke, K., et al., Surf. Sci., 2003, vol. 256, nos. 1-2, p. 137.
20. Lukirsky, A.P., Fomichev, V.A., and Rudnev, A.V., Apparatus and Methods for X-ray Analysis, Leningrad, 1970, no. 9, p. 89.
21. Grysinsky, M., Phys. Rev. [Sect.] A, 1965, vol. 138, p. 305.
22. Grysinsky, M., Phys. Rev. [Sect.] A, 1965, vol. 138, p. 322.
23. Henke, B.L., Lee, P., Tanaka, T.J., et al., At. Data Nucl. Data Tables, 1982, vol. 27, no. 1, p. 1.