The modification of mechanical properties by 2 MeV Si ions irradiating polyimide

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 12-13, 2008, Pages 3091-3094

  Chen, Tianxiang ^a   Yao, Shude ^a   Wang, Kun ^a   Wang, Huan ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

61.80.Jh; 61.82.Pv; 62.20.2x; Ion implantation; Mechanical properties; Polyimide

Indexed keywords

ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BOMBARDMENT; ION SOURCES; POLYIMIDES; POLYMER FILMS;

FRICTION COEFFICIENTS; POLYIMIDE (PI) FILMS;

SILICON;

EID: 44649160616     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.168     Document Type: Article

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