Realization of a computed tomography setup to achieve resolutions below 1 μm

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 591, Issue 1, 2008, Pages 50-53

  Salamon, M ^a   Hanke, R ^a   Kruger P ^b   Uhlmann, N ^a   Voland, V ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^b FRAUNHOFER INSTITUTE FOR NON DESTRUCTIVE TESTING   (Germany)

Author keywords

High resolution CT; High resolution X ray imaging; Submicron computed tomography

Indexed keywords

IMAGE RESOLUTION; IMAGING SYSTEMS; MICROMETERS; X RAY ANALYSIS;

HIGH-RESOLUTION X-RAY IMAGING; SUBMICRON COMPUTED TOMOGRAPHY;

COMPUTERIZED TOMOGRAPHY;

EID: 44649130642     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2008.03.024     Document Type: Article

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