Polymer surface morphology control by reactive ion etching for microfluidic devices

Sensors and Actuators, B: Chemical

Volumn 132, Issue 2, 2008, Pages 637-643

  Nabesawa, Hirofumi ^a,b   Hitobo, Takeshi ^c   Wakabayashi, Suguru ^d   Asaji, Toyohisa ^c   Abe, Takashi ^e   Seki, Minoru ^b  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b CHIBA UNIVERSITY   (Japan)

^c Tateyama Machine Co Ltd   (Japan)

^d Tateyama Kagaku Ind Co Ltd   (Japan)

^e TOHOKU UNIVERSITY   (Japan)

Author keywords

Microfluidic device; Polymer etching; Polymethylmetacrylate (PMMA); Reactive ion etching (RIE); Surface morphology

Indexed keywords

CHARGED PARTICLES; CHEMICALS; COMPUTER NETWORKS; CYCLOTRONS; ELECTRON CYCLOTRON RESONANCE; ELECTRONS; ETCHING; FLUIDIC DEVICES; FLUIDICS; GEOPHYSICAL PROSPECTING; MAGNETISM; MICROFLUIDICS; MORPHOLOGY; NANOFLUIDICS; POLYMERS; REACTIVE ION ETCHING; SURFACE PROPERTIES; SURFACES;

(1 1 0) SURFACE; CONCENTRATION (COMPOSITION); ELECTRON CYCLOTRON RESONANCE (ECR); ETCHING CHARACTERISTICS; MICRO-FLUIDIC DEVICES; NOVEL METHODS; POLYMER SURFACE MORPHOLOGY; REACTIVE ION; REACTIVE ION ETCHING (REI); SMOOTH SURFACES; TOTAL PRESSURE; WIDE-RANGE;

SURFACE MORPHOLOGY;

EID: 44649108865     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.01.050     Document Type: Article

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