Integrated uncooled array IR sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3200, Issue , 1997, Pages 179-182

  Pevtsov, Eugeny Ph ^a   Elkin, Eugeny G ^b   Pospelova, Marina A ^b  

^a MIREA RUSSIAN TECHNOLOGICAL UNIVERSITY   (Russian Federation)

^b Pulsar Science Research Inst   (Russian Federation)

Author keywords

MEMS technology; Pyroelectric films; Uncooled array sensors

Indexed keywords

BARIUM; CHARGE COUPLED DEVICES; INFRARED DETECTORS; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; PYROELECTRICITY; SENSORS;

ELECTRODE STRUCTURES; IR SENSORS; MEMS TECHNOLOGY; POLYVINYLIDENE FLUORIDES; PYROELECTRIC FILMS; PYROELECTRIC SIGNALS; SENSITIVE FILMS; UNCOOLED ARRAY SENSORS; ZIRCONATE;

BARIUM TITANATE;

EID: 44449173513     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284744     Document Type: Conference Paper

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