Development of a dual-phase virtual metrology scheme

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 270-275

  Cheng, Fan Tien ^a,b   Huang, Hsien Cheng ^b   Kao, Chi An ^b  

^a IEEE

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Global Similarity Index (GSI); Phase I virtual metrology value (VMI); Phase II virtual metrology value (VMII); Reliance Index (RI)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GLASS; LIQUID CRYSTAL DISPLAYS; PERSONNEL TRAINING; SEMICONDUCTOR DEVICE MANUFACTURE;

GLOBAL SIMILARITY INDEX (GSI); RELIANCE INDEX (RI);

VIRTUAL REALITY;

EID: 44449160045     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341679     Document Type: Conference Paper

References (10)

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