RBS and XPS study of TiOx layers prepared by the PVD technique

Surface and Interface Analysis

Volumn 36, Issue 8, 2004, Pages 1171-1173

  Mackova A ^a   Perina V ^a   Krumeich, J ^b   Zemek, J ^c   Kolouch, A ^d  

^a NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

^b Sulzer Innotec   (Switzerland)

^c INSTITUTE OF PHYSICS   (Czech Republic)

^d TECHNICAL UNIVERSITY OF LIBEREC   (Czech Republic)

Author keywords

ERDA; PVD coating; RBS; TiOx layers; XPS

Indexed keywords

ERDA; OXYGEN FLOW RATE; PVD COATINGS; TIOX LAYERS;

CHEMICAL BONDS; COATINGS; CONTAMINATION; OXYGEN; PHYSICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE PROPERTIES; X RAY PHOTOELECTRON SPECTROSCOPY;

TITANIUM DIOXIDE;

EID: 4444366397     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1868     Document Type: Conference Paper

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