Sub-100-nm current-perpendicular-to-plane sensor fabrication

IEEE Transactions on Magnetics

Volumn 40, Issue 4 II, 2004, Pages 2248-2250

  Zheng, Y K ^a   Li, K B ^a   Qiu, J J ^a   Han, G C ^a   Guo, Z B ^a   Zong, B Y ^a   An, L H ^a   Luo, P ^a   Liu, Z Y ^a   Wu, Y H ^a,b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Current perpendicular to plane (CPP); Giant magnetoresistance (GMR) effect; Probe recording; Spin valve (SV)

Indexed keywords

CURRENT-PERPENDICULAR-TO-PLANE (CPP); GIANT MAGNETO-RESISTANCE (GMR) EFFECTS; PROBE RECORDING; SPIN-VALVES (SV);

COMPUTER SIMULATION; DEPOSITION; ELECTRIC CONDUCTANCE; ELECTRODES; ELECTRON BEAM LITHOGRAPHY; ETCHING; FERROMAGNETISM; FINITE ELEMENT METHOD; GIANT MAGNETORESISTANCE; ION BEAMS; MAGNETIC HEADS; SCANNING ELECTRON MICROSCOPY; THICK FILMS;

SENSORS;

EID: 4444361775     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.830204     Document Type: Conference Paper

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