A moving-slider MEMS actuator for high-bandwidth HDD tracking

IEEE Transactions on Magnetics

Volumn 40, Issue 4 II, 2004, Pages 3171-3173

  Hirano, Toshiki ^a   White, Matthew ^a   Yang, Henry ^a   Scott, Karen ^a   Pattanaik, Surya ^a   Arya, Satya ^a   Huang, Fu Ying ^a  

^a SAN JOSE RESEARCH CENTER   (United States)

Author keywords

Bipolar actuator; High bandwidth tracking servo; MEMS; Microactuator; Sidewall bonding pad

Indexed keywords

BANDWIDTH; BONDING; CAPACITORS; ELECTRIC POTENTIAL; ELECTROPLATING; HARD DISK STORAGE; MICROELECTROMECHANICAL DEVICES; RESONANCE; SCANNING ELECTRON MICROSCOPY;

BIPOLAR ACTUATORS; HARD-DISK DRIVES (HDD); HIGH-BANDWIDTH TRACKING SERVO; SIDEWALL BONDING PAD;

MICROACTUATORS;

EID: 4444322726     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.829840     Document Type: Article

References (5)

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3. T. Hirano, L.-S. Fan, T. Semba, W. Y. Lee, J. Hong, S. Pattanaik, P. Webb, W.-H. Juan, and S. Chan, "High-bandwidth HDD tracking servo by a moving-slider micro-actuator," IEEE Trans. Magn., vol. 35, pp. 3670-3672, Sept. 1999.
4. L.-S. Fan, S. J. Woodman, R. C. Moore, L. Crawforth, T. C. Reiley, and M. A. Moser, "Batch-fabricated area-efficient milli-actuator," in Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1994, pp. 38-42.
5. M. White, P. Hingwe, and T. Hirano, "Comparison of a MEMS microactuator and a PZT milliactuator for high-bandwidth HDD servo," presented at the American Control Conf., June 2004. Paper WeA16.6.