Fabricating narrow and trapezoidal main poles for single-pole-type heads

IEEE Transactions on Magnetics

Volumn 40, Issue 4 II, 2004, Pages 2329-2331

  Okada, Tomohiro ^a   Kimura, Hisashi ^a   Nunokawa, Isao ^a   Yoshida, Nobuo ^a   Etoh, Kimitoshi ^a   Fuyama, Moriaki ^a  

^a HITACHI LTD   (Japan)

Author keywords

Etching; Magnetic heads; Perpendicular magnetic recording; Sputtering

Indexed keywords

ALUMINUM; ANNEALING; ION BEAMS; MAGNETIC FILM STORAGE; MAGNETIC RECORDING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SPUTTERING;

FOCUSED ION BEAMS (FIB); ION MILLING; PERPENDICULAR MAGNETIC RECORDING;

MAGNETIC HEADS;

EID: 4444320763     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.830215     Document Type: Article

References (7)

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