3D reconstruction of rough surfaces by SEM stereo imaging

Microchimica Acta

Volumn 139, Issue 1-4, 2002, Pages 135-144

  Pouchou, Jean Louis ^a   Boivin, Denis ^a   Beauchêne, Pierre ^a   Le Besnerais, Guy ^a   Vignon, Fabien ^a  

^a ONERA   (France)

Author keywords

3D reconstruction; Scanning electron microscopy; SEM; Stereoscopic images; Stereovision

Indexed keywords

EID: 4444320330     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s006040200052     Document Type: Article

References (7)

1. J. J. Ammann, E. Bouchaud, Euro. Phys. J. Applied Phys. 1998, 4, 133.
2. M. Coster, J. L. Chermant, Proc. ANRT/G8 Meeting. Pau, 1998.
3. A. J. Lacey, N. A. Thacker, S. Crossley, R. B. Yates, Image and Vision Computing 1998, 16, 373.
4. W. D. Lockwood, A. P. Reynolds, Mate. Characterization 1999, 42, 123.
5. S. Scherer, O. Kolednik, Euro. Micro, and Anal. 2001, 70, 15.
6. D. Leroux, G. Le Besnerais, ONERA Report, RT 1/3798 DMMP/N/DTIM, 1998.
7. F. Vignon, G. Le Besnerais, L. Quan, D. Boivin, J. L. Pouchou, Proc. Physics in Image and Signal Processing, Marseille, Jan. 2001 Conference. Marseille, 2001.