Deposition of Ti/C compositional gradient film onto superplastic Ti-alloy by magnetron sputtering

Surface and Interface Analysis

Volumn 36, Issue 8, 2004, Pages 1144-1146

  Sonoda, T ^a   Watazu, A ^a   Kato, K ^a   Yamada, T ^a   Asahina, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Auger electron spectroscopy; Graded coating; Magnetron sputtering; Titanium alloy; Titanium carbide

Indexed keywords

GRADED COATINGS; GRADIENT FILMS; RADIO FREQUENCIES (RF); TITANIUM DISKS;

ADHESION; AUGER ELECTRON SPECTROSCOPY; BIOCOMPATIBILITY; CATHODES; CERAMIC COATINGS; COMPOSITION; HARDNESS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; TITANIUM ALLOYS; WEAR RESISTANCE; X RAY DIFFRACTION;

TITANIUM CARBIDE;

EID: 4444307172     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1861     Document Type: Conference Paper

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