X-ray analysis of texture domains in nonhomogeneous thin films deposited by physical vapour deposition

Thin Solid Films

Volumn 467, Issue 1-2, 2004, Pages 326-333

  Scardi, P ^a   Leoni, M ^a   D'Incau, M ^a  

^a UNIVERSITY OF TRENTO   (Italy)

Author keywords

PVD; r.f. magnetron sputtering; Texture; Thin film; X ray diffraction

Indexed keywords

DATA REDUCTION; EPITAXIAL GROWTH; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; SILICON; SUBSTRATES; SYNCHROTRON RADIATION; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZIRCONIA;

GRAIN-TO-GRAIN INTERACTION MECHANISM; LAYER THICKNESS; NONHOMOGENEOUS THIN FILMS; TEXTURE DOMAINS;

THIN FILMS;

EID: 4444264800     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.04.044     Document Type: Article

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