High sensitive and wide detecting range MOS tunneling temperature sensors for on-chip temperature detection

IEEE Transactions on Electron Devices

Volumn 51, Issue 9, 2004, Pages 1514-1521

  Shih, Yen Hao ^a   Lin, Shian Ru ^b   Wang, Tsung Miau ^c   Hwu, Jenn Gwo ^c,d  

^a MACRONIX INTERNATIONAL CO LTD   (Taiwan)

^b REALTEK SEMICONDUCTOR CORP   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d NATIONAL UNITED UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GATE CURRENT; TEMPERATURE DETECTION; TEMPERATURE SENSITIVITY; TEMPERATURE SENSOR ARRAY; TUNNELING TEMPERATURE SENSORS;

ARRAYS; CMOS INTEGRATED CIRCUITS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR JUNCTIONS; SENSORS; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS; TUNNEL DIODES;

MOS DEVICES;

EID: 4444254154     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2004.833571     Document Type: Article

References (15)

1. C. N. Liao, C. Chen, and K. N. Tu, "Thermoelectric characterization of Si thin films in silicon-on-insulator wafer," J. Appl. Phys., vol. 86, no. 8, pp. 3204-3208, Sept. 1999.
2. H. Sanchez, B. Kuttanna, T. Olson, M. Alexander, G. Georosa, R. Philip, and J. Alvarez, "Thermal management system for high performance power PC microprocessors," in Proc. Compcon, 1997, pp. 325-330.
3. A. Syal, V. Lee, A. Ivanov, and J. Altet, "CMOS differential and absolute thermal sensors," in Proc. On-Line Testing Workshop, 2001, pp. 127-132.
4. V. Szekely, C. Marta, Z. Kohari, and M. Rencz, "CMOS sensors for on-line thermal monitoring of VLSI circuits," IEEE Trans. VLSI Syst., vol. 5, pp. 270-276, Sept. 1997.
5. J. Altet, A. Rubio, S. Dilhaire, E. Schaub, and W. Claeys, "BiCMOS thermal sensor circuit for built-in test purposes," Electron. Lett., vol. 34, pp. 1307-1309, June 1998.
6. A. Bakker and J. H. Huijsing, "Micropower CMOS temperature sensor with digital output," IEEE Trans. Solid-State Circuits, vol. 31, pp. 933-937, July 1996.
7. G. Fisher, J. C. Daly, C. W. Recksiek, and K. D. Friedland, "A programmable temperature monitoring device for tagging small fish: A prototype chip development," IEEE Trans. VLSI Syst., vol. 5, pp. 401-407, Dec. 1997.
8. J. L. Merino, S. A. Bota, A. Herms, E. Cabruja, X. Jorda, A. Ferre, J. Bigorra, J. Samitier, M. Vellvehi, and J. Bausells, "Smart temperature sensor for on-line monitoring in automotive applications," in Proc. On-Line Testing Workshop, 2001, pp. 122-126.
9. V. F. Mitin, V. V. Kholevchuk, R. V. Konakova, and N. S. Boltovet, "Temperature microsensors," in Proc. Semiconductor Conf., vol. 2, 1999, pp. 495-498.
10. Y. H. Shih and J. G. Hwu, "An on-chip temperature sensor by utilizing a MOS tunneling diode," IEEE Electron Device Lett., vol. 22, pp. 299-301, June 2001.
11. T. P. Chen, S. Li, S. Fung, and K. F. Lo, "Interface generation by FN injection under dynamic oxide field stress," IEEE Trans. Electron Devices, vol. 45, pp. 1920-1926, Sept. 1998.
12. A. Yassine, H. E. Nariman, and K. Olasupo, "Field and temperature dependence of TDDB of ultrathin gate oxide," IEEE Electron Device Lett., vol. 20, pp. 390-392, Aug. 1999.
13. W. C. Lee and C. Hu, "Modeling gate and substrate currents due to conduction- and valence-band electron and hole tunneling," in Symp. VLSI Tech. Dig., June 2000, pp. 198-199.
14. C. G. Fonstad, Microelectronic Devices And Circuits. New York: McGraw-Hill, 1994, p. 153.
15. S. M. Sze, VLSI Technology, 2nd ed. New York: McGraw-Hill, 1988, p. 656.