Macroporous silicon membranes as electron and x-ray transmissive windows

Applied Physics Letters

Volumn 85, Issue 7, 2004, Pages 1152-1154

  Schilling, J ^a   Scherer, A ^a   Gosele U ^b   Kolbe, M ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPES (ESEM); MACROPOROUS MATERIALS; MICROPOROUS SILICON; SILICON MEMBRANES;

ELECTROMAGNETIC WAVES; ELECTRON OPTICS; ENERGY DISPERSIVE SPECTROSCOPY; FABRICATION; INORGANIC ACIDS; MEMBRANES; PHOTOLITHOGRAPHY; POROSITY; SCANNING ELECTRON MICROSCOPY; SILICA; SILICON WAFERS; X RAYS;

POROUS SILICON;

EID: 4444235231     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1772519     Document Type: Article

References (7)

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