Experimental study of a flat silicon heat pipe with microcapillary grooves

Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference

Volumn 2, Issue , 2004, Pages 47-51

  Gillot, C ^a   Lai A ^a   Ivanova, M ^b   Avenas, Y ^b   Schaeffer, C ^b   Fournier, E ^c  

^a CEA GRENOBLE   (France)

^b LABORATOIRE D ELECTROTECHNIQUE DE GRENOBLE   (France)

^c CNES   (France)

Author keywords

Groove; Heat pipe; Miniature; Silicon; Spreading; Vapor

Indexed keywords

CHANNEL HEIGHTS; POWER DENSITY; VAPOR SPACES; WORKING FLUIDS;

CAPILLARY TUBES; EVAPORATION; HEAT FLUX; HEAT SINKS; RELIABILITY; THERMAL CONDUCTIVITY; VAPORS;

HEAT EXCHANGERS;

EID: 4444231129     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Peterson G.P., Duncan A.B., Weichold M.H., "Experimental Investigation of Micro Heat Pipes Fabricated in Silicon Wafers", Journal of Heat Transfer, Vol. 115, Aug. 1993, pp. 751-756.
2. Mallik A.K., Peterson G.P., Weichold M.H., "Fabrication of Vapor-Deposited Micro Heat Pipe Arrays as an Integral Part of Semiconductor device", Journal of micromechanical systems, Vol. 4, Sept. 1995, pp. 119-131.
3. Badran B., Gerner F.M., P. Ramadas, Henderson T., Baker K.W., "Experimental results for low-temperature silicon micromachined micro heat pipe arrays using water and methanol as working fluid", Experimental heat transfer, Vol. 10, N° 4, 1997, pp. 253-272.
4. Lee M., Wong M., Zohar Y., "Characterization of an integrated micro heat pipe", Journal of Micromechanics and Microengineering, Vol. 13, 2003, pp. 58-64.
5. Kang S.W., Huang D., "Fabrication of star grooves and rhombus grooves micro heat pipe", Journal of Micromechanics and Microengineering, Vol. 12, 2002, pp. 525-531.
6. Benson D.A., Mitchell R.T., Tuck M.R., Palmer D.W., Peterson G.P., "Ultrahigh-capacity micromachined heat spreaders", Microscale Thermophysical Engineering, Vol. 2, 1998, pp. 21-30.
7. Kang S.W., Tsai S.H., Chen H.C., "Fabrication and test of radial grooved micro heat pipes", Applied Thermal Engineering, Vol. 22, 2002, pp. 1559-1568.
8. Gillot C., Avenas Y., Cezac N., Poupon G., Schaeffer C., Fournier E., "Silicon heat pipes used as thermal spreaders", IEEE Transactions on Components and Packaging Technologies, Vol. 26, no. 2, June 2033, pp. 332-339.
9. Gao M., Cao Y., Kinzy Jones W., Zampino M.A., "Ceramic Miniature Heat Pipes and Liquid Charging Method", Proceedings of the ASME Heat Transfer Division, HTD-Vol. 366.4, 2000.