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Volumn 77, Issue 4, 2004, Pages 159-165

Surface and depth profile analysis of insulating samples by TOF-SIMS

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MATRICES; ION IMAGES; ORGANIC FUNCTIONAL COATINGS;

EID: 4444229044     PISSN: 09467475     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (15)
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    • 84862422147 scopus 로고
    • Steuerung und Optimierung teilchenstrahlinduzierter Oberflächenprozesse von Isolatorwerkstoffen
    • Düsseldorf: VDI-TZ Phys. Technol.
    • Rupertus, V.; Martin, D.; Rothhaar, U. et al.: Steuerung und Optimierung teilchenstrahlinduzierter Oberflächenprozesse von Isolatorwerkstoffen. In: Proc. Statusseminar Dünnschichttechnologien. Düsseldorf: VDI-TZ Phys. Technol., 1992. P. 791.
    • (1992) Proc. Statusseminar Dünnschichttechnologien , pp. 791
    • Rupertus, V.1    Martin, D.2    Rothhaar, U.3
  • 10
    • 0003550314 scopus 로고    scopus 로고
    • Certificate of Analysis
    • Certificate of Analysis, NIST Standard Reference Material 612, http://patapsco.nist.gov/srmcatalog/certificates/view_ cert2gif.cfm?certificate= 612.
    • NIST Standard Reference Material , vol.612
  • 11
    • 0003550314 scopus 로고    scopus 로고
    • Certificate of Analysis
    • Certificate of Analysis, NIST Standard Reference Material 614, http://patapsco.nist.gov/srmcatalog/certificates/view_ cert2gif.cfm?certificate= 614.
    • NIST Standard Reference Material , vol.614
  • 12
    • 4444364771 scopus 로고    scopus 로고
    • European Commission, bcr information. Report EUR 18852 EN (1999)
    • European Commission, bcr information. Report EUR 18852 EN (1999).
  • 13
    • 0000750834 scopus 로고    scopus 로고
    • Profiling with optimized depth resolution
    • Gillen, G.; Lareau, R.; Bennett, J. et al. (eds.): Chichester: Wiley
    • Iltgen, K.; Benninghoven, A.; Niehuis, E.: Profiling with optimized depth resolution. In: Gillen, G.; Lareau, R.; Bennett, J. et al. (eds.): Secondary ion mass spectrometry (SIMS XI). Chichester: Wiley, 1998. P. 367.
    • (1998) Secondary Ion Mass Spectrometry (SIMS XI) , pp. 367
    • Iltgen, K.1    Benninghoven, A.2    Niehuis, E.3
  • 14
    • 5844306503 scopus 로고    scopus 로고
    • Optimized time-of-flight secondary ion mass spectroscopy depth profiling with dual beam technique
    • Iltgen, K.; Bendel, C.; Benninghoven A. et al.: Optimized time-of-flight secondary ion mass spectroscopy depth profiling with dual beam technique. J. Vac. Sci. Technol. A 15 (1997) no. 3, pp. 460-464.
    • (1997) J. Vac. Sci. Technol. A , vol.15 , Issue.3 , pp. 460-464
    • Iltgen, K.1    Bendel, C.2    Benninghoven, A.3
  • 15
    • 0141427831 scopus 로고    scopus 로고
    • Coatings on plastics with the PICVD technology
    • Kuhr, M.; Bauer, S.; Rothhaar, U. et al.: Coatings on plastics with the PICVD technology. Thin Solid Films 442 (2003) pp. 107-116.
    • (2003) Thin Solid Films , vol.442 , pp. 107-116
    • Kuhr, M.1    Bauer, S.2    Rothhaar, U.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.