Sliding-mode control algorithm for a hard-mounted isolation system

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 9 PART C, Issue , 2008, Pages 2003-2008

  Wang, Yung Pang ^a   Tsao, Jen Chieh ^a  

^a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Active vibration control; Hard mounted isolation system; Sliding mode control; Vibration isolation

Indexed keywords

ALGORITHMS; MEMS; MICROBIOLOGY; NANOTECHNOLOGY; SEMICONDUCTOR DEVICE MANUFACTURE; VIBRATION ANALYSIS; DAMAGE DETECTION; MACHINING; VIBRATION CONTROL;

ACTIVE VIBRATION CONTROL; HARD-MOUNTED ISOLATION SYSTEM; VIBRATION ISOLATION; ACTIVE ISOLATION SYSTEMS; ACTIVE VIBRATION CONTROLS; ENVIRONMENTAL VIBRATIONS; ISOLATION SYSTEMS; MICROVIBRATION CONTROL; SEMICONDUCTOR MANUFACTURING; ULTRAPRECISION MACHINING; VIBRATION ISOLATIONS;

SLIDING MODE CONTROL;

EID: 44349173615     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2007-43207     Document Type: Conference Paper

References (10)

1. Ungar, E. E., Sturz, D. H. and Amick, C. H., 1990, "Vibration Control Design of High Technology Facilities," Sound and Vibration, pp. 20-27.
2. Gordon, C., 1988, "Generic Criteria for Vibration-Sensitive Equipment," Proceedings of SPIE-Vibration Control in Microelectronics, Optics and Metrology, Vol. 1619.
3. "IDE Product Catalog - Active and Possive Isolation Modules," Integrated Dynamics Engineering, INC., USA.
4. Hansen, C. H., and Snyder, S. D., 1997, "Active Control of Noise and Vibration," E & FN Spon, UK.
5. Beard, A. M., von Flotow, A. H. and Schubert, D. W., "A Practical Product Implementation of an Active/Passive Vibration Isolation System," Proceedings of IUTAM Symposium on the Active Control of Vibration, Bath, U.K., pp. 101-108.
6. Mizutani, K., Fujita, Y. and Ohmori, H., 1996, "Hybrid Control System for Microvibration Isolation," AMC'96-MIE, pp. 577-582.
7. th Technological and Vocational Education Conference of R.O.C (Mechanical Engineering), Taichung, Taiwan, pp.99-108. (in Chinese)
8. Wang, Yung-peng and Wu, Yung-chi, 2004, "Active Control Algorithms for a Modified Hard-Mounted Isolation System," 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California, USA, IMECE2004-59523.
9. Slotine, Jean-Jacques E. and Li Weiping, 1991, "Applied Nonlinear Control," Prentice-Hall.
10. Utkin, V. I., 1977, "Variable Structure Systems With Sliding Modes: A Survey," IEEE Transactions on Automatic Control, Vol. AC-22, pp.212-222.