|
Volumn 254, Issue 18, 2008, Pages 5959-5966
|
Atom-sensitive textiles as visual indicators for plasma post-discharges
|
Author keywords
Downstream plasma; Optical emission spectroscopy; Process control; Process indicators; Textiles; Thermochromism
|
Indexed keywords
OPTICAL EMISSION SPECTROSCOPY;
PLASMA DIAGNOSTICS;
PROCESS CONTROL;
SURFACE DISCHARGES;
THERMOCHEMISTRY;
DOWNSTREAM PLASMA;
PLASMA POST-DISCHARGES;
PROCESS INDICATORS;
THERMOCHROMISM;
TEXTILES;
|
EID: 44349136200
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2008.03.166 Document Type: Article |
Times cited : (13)
|
References (23)
|