Influence of acoustic noise on the dynamic performance of MEMS gyroscopes

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 9 PART C, Issue , 2008, Pages 1825-1831

  Castro, Simon ^a   Roth, Grant ^a   Dean, Robert ^a   Flowers, George T ^a   Grantham, Brian ^b  

^a AUBURN UNIVERSITY   (United States)

^b US Army AMRDEC

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACOUSTIC NOISE; GYROSCOPES; NATURAL FREQUENCIES; UNITS OF MEASUREMENT;

CONVENTIONAL GYROSCOPES; INERTIAL MEASUREMENT UNITS (IMU); DYNAMIC PERFORMANCE; ENVIRONMENTAL CONDITIONS; FREQUENCY RANGES; INERTIAL MEASUREMENT SYSTEM; INERTIAL MEASUREMENT UNIT; MEMS GYROSCOPE; MEMS TECHNOLOGY; NOISE AMPLITUDE;

MEMS; ACOUSTIC NOISE;

EID: 44349085289     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2007-42108     Document Type: Conference Paper

References (3)

1. Dean, R., Flowers, G, Sanders, N., Horvath, R., Johnson, W., Kranz, M., Whitley, M., "Experimental validation and testing of components for active damping control for micromachined mechanical vibration isolation filters using electrostatic actuation", Proceedings of SPIE - The International Society for Optical Engineering, v 6172, Smart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 2006, p 61721C
2. Agarwal, M., Park, K.K., Hopcroft, M., Chandorkar, S., Candler, R.N., Kim, B., Melamud, R., Yama, G., Murmann, B., Kenny, T.W., "Effects of mechanical vibrations and bias voltage noise on phase noise of MEMS resonator based oscillators", Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), v 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p 154-157.
3. Wilson, C., "Noise Control - Revised Edition", Krieger Publishing Company, Malabar, Florida, 2006, pp. 240-250.