High sensitive tilt sensor for quartz micromachining

IEEJ Transactions on Sensors and Micromachines

Volumn 127, Issue 10, 2007, Pages

  Kohsaka, Fusao ^a   Liang, Jinxing ^b   Matsuo, Takahiro ^a   Ueda, Toshitsugu ^a  

^a WASEDA UNIVERSITY   (Japan)

^b Sakamoto Electric Mfg Co Ltd   (Japan)

Author keywords

Anisotropic etching; Capacitance; Micromachining; Quartz; Tilt sensor

Indexed keywords

COMB ELECTRODES; EVALUATION RESULTS; FABRICATION PROCESS; GRAVITY CHANGES; MASS PRODUCTION; MEMS SENSORS; MEMS TECHNOLOGY; MICROMACHINING QUARTZ; PERFORMANCE ACCELERATION; QUARTZ CRYSTAL; QUARTZ MICROMACHINING; SENSOR CHIPS; TILT ANGLE MEASUREMENT; TILT SENSOR;

ANGLE MEASUREMENT; ANISOTROPIC ETCHING; ANISOTROPY; CAPACITANCE; COMPOSITE MICROMECHANICS; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OXIDE MINERALS; QUARTZ;

SENSORS;

EID: 44149115688     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.127.431     Document Type: Article

References (6)

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2. Japanese source
3. F. Kohsaka, J. Liang, and T. Ueda :"High Sensitive Tilt Sensor for Quartz Micromachining", Proceedings of 22nd Sensor Symposium, pp.371-374 (2005)
4. Japanese source
5. Japanese source
6. T. Matsuo, K. Kunitomo, and T. Ueda :"Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and Its Evaluation", Proceedings of 22nd Sensor Symposium, pp.233-236 (2005)